To meet market demands and achieve high-quality, high-precision, and high-efficiency manufacturing of micro shafts, micro holes, array holes, and micro three-dimensional structures, ultra-micro CNC electrical discharge machining (EDM) machines are under development. These machines can be applied in the fields of biomedical, electronic communications, MEMS, and other micro devices/micro molds. Main technical features and innovations: 1) Precision rotary feed peristaltic composite function spindle 2) Compact linear electrode discharge grinding mechanism for online production of micro electrodes 3) High-frequency micro energy pulse discharge power supply 4) Tangential feed linear electrode discharge grinding method for online production of micro electrodes 5) Innovative three-dimensional micro electrical discharge servo scanning processing technology 6) Depth precision control algorithm for micro three-dimensional structures 7) System integration of three-dimensional micro structure precision electrical discharge machining machines.